Electroplating wafer holder
WebTechnologies for Microsystems - WAFER HOLDERS – SUBSTRATE HOLDERS – GALVANIC UNITS - PLATING UNIT – PROCESS SYSTEMS - ELECTROPLATING, CHEMICAL and ELECTROCHEMICAL ETCHING. contact process infos/publications references about us. Wafer Holders for 2" - 12" Wafers and 10 x 10 bis 1200 x 1200 … Webwafer plating technology to panel substrates. Individual panels are loaded in a rigid holder to minimize warpage and provide the large currents necessary for plating large areas. …
Electroplating wafer holder
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WebAn advanced plating reactor, specifically for copper. Modern semiconductor copper plating employs highly-engineered organic additives that enable excellent plated feature … Webthe wafer holder assembly . [ 0008 ] In practicing this embodiment , the force applied to the deplating disk may be the same as the force applied to a plating wafer when a plating wafer is sealed in the wafer holder assembly . Conversely , the force applied to the deplat ing disk may be different ( less force or more force ) as
WebAug 8, 2006 · A workpiece processing station is disclosed. The workpiece processing station has particular applicability in an electroplating process for semiconductor wafers. The apparatus includes a work processing bowl having an outer bowl and an inner cup positioned at a location slightly below the upper rim of the bowl. An annular space is …
WebApr 3, 2016 · AMMT's fields of activity comprise anisotropic and isotropic wet etching of wafer substrates, electrochemical etch-stop techniques, porous silicon formation, electroplating, and vapor-phase release techniques for surface micromachining. ... (Wafer holder for electroplating) product information: PDF, 277 KByte: 15.02.2016: μGALV … WebThe invention claimed is: 1. An electroplating apparatus, comprising: a plating bath in which a plating solution is accommodated; a cathode holder having an engaging hole disposed penetrating through a bottom portion of the plating bath; a wafer hold disposed at an upper end of the engaging hole; a wafer holder that is detachable from the engaging …
WebOct 19, 1998 · An electroplating device for wafer metallization as set forth in claim 6 which further comprises means for rotating said contact peg assembly and said wafer while said electrolyte is pumped upward against said rotating wafer, said holder supporting said wafer so that an active surface of a wafer is exposed to electrolyte and the opposite side ...
WebA wafer is first electroplated by lowering the wafer holder to a position in the inner plating bath container that is below a plating solution level. After electroplating, the wafer is … chris lipman starhubWebJul 18, 2007 · An electroplating apparatus includes: a wafer holder that is detachable from an engaging hole of a cathode holder and capable of moving in a up and down … chrislip and larsonWebFeb 17, 2010 · Amazon.com: NEW Patent CD for Semiconductor wafer holder and electroplating system for plating a : Everything Else chris lionWeb2 days ago · The Global Wafer Plating Equipment market is anticipated to rise at a considerable rate during the forecast period, between 2024 and 2030. In 2024, the market is growing at a steady rate and with ... chris lipfordWebOne of on the use of a specially designed electroplating wafer holder the relevant key technologies for 3D-SiP is the use of for local sealing and filling of the vias. The technology Through-Wafer-Interconnects (TWIs) to vertically stack and presented here requires only a single step plating process to connect devices. ... chris lipman disneyWebJun 1, 2006 · The same sample holder used for electroplating experiments could be integrated into the SECM instrument. Conductive thin-film barrier materials were deposited on planar silicon wafers. geoff lockeyWebElectroplating was performed in a cyanide based solution (Autronex-GVC from Enthone Inc.) using constant current in the range of 3.0-10 mA, corresponding to a current density in a range of~1.5-5.0 ... geoff lock ironwork